All Issue

2024 Vol.44, Issue 5 Preview Page

Research Article

Design of Transparent Conductive Oxides with Metal Patterning Techniques

금속 패터닝 기반 고투과성 산화물 투명전극 설계

Hyeji Kim1†
,
Junghyun Lee2†
,
Younggwang Lee1
,
Minwoo Hong1
,
Dohyun Kim1
,
Inpyo Lee1
,
Chanhyuk Choi2
,
Joondong Kim3*
김 혜지1†
,
이 정현2†
,
이 영광1
,
홍 민우1
,
김 도현1
,
이 인표1
,
최 찬혁2
,
김 준동3*
1A Bachelor’s Degree, Department of Electrical Engineering, Incheon National University
2Master Course, Department of Electrical Engineering, Incheon National University
3Professor, Department of Electrical Engineering, Incheon National University
1인천대학교 전기공학과, 학사과정
2인천대학교 전기공학과, 석사과정
3인천대학교 전기공학과, 교수
*Corresponding Author
†These authors equally contributed to this work.
30 October 2024. pp. 33-42
PDF XML Citation
Abstract

Transparent electrodes overcome the limitations of opaque electrodes by allowing visible light to pass through, which facilitates their application in various fields such as transparent photovoltaics, displays, and smart windows. Particularly, transparent electrodes that are more effective in terms of transmittance are useful and structurally flexible. In this study, an efficient approach is proposed for designing transparent conductive oxides with improved transmittance. The oxide/metal/oxide (OMO) structure exhibits outstanding transparency and electrical conductivity. Therefore, a patterned OMO structure was proposed, in which metal oxides and patterned metal layers are deposited. The improvement in the transmittance and the effective resistance by through the patterned structure applied to the metal layer of the OMO structure was confirmed. Patterning the metal layer enabled the superimposition of light absorption, reflection, and scattering effects, which resulted in enhanced optical transparency while maintaining remarkable electrical conductivity. To confirm the transmittance and electrical conductivity of the patterned OMO structure, two types of patterned structures were designed: stripe and hole. These patterned OMO structures exhibit excellent optical transmittances of 73.94% and 74.51%, showcasing an improvement of over 8% compared with the planar OMO structure. Sheet resistance is also significantly affected via pattern designs, reaching 2.15 Ω/□ of striped- pattern and 2.11 Ω/□ of hole-pattern. This suggests that transparent conductive oxides of metal patterning is highly effective to improve the optical and electrical features to be adopted in transparent photovoltaics, energy utilities, and transparent devices.

Keywords
Transparent conductive Electrode
Metal patterning
Metal oxide-metal-metal oxide structure
Indium tin oxide
Ag
Transmittance
키워드
투명전극
금속 패터닝
OMO 구조
ITO
은
투과도
References
1

Lee, G.-H., Lee, S.-H., Yun, J.-H., and Kim, D.-H., Technological Trends in ITO Transparent Electrode Materials, Information Display, Vol. 11, No. 5, pp. 17-22, 2010.

10.1080/15980316.2010.9652112
2

Ginley, D. S. and Perkins, J. D., Transparent Conductors, Handbook of Transparent Conductors, Boston, MA: Springer US, pp. 1-25, 2010, https://doi.org/10.1007/978-1-4419-1638-9_1.

10.1007/978-1-4419-1638-9_1
3

Wu, H., Kong, D., Hsu, P.-C., Carney, T. J., Hu, L., and Cui, Y., A Transparent Electrode Based on a Metal Nanotrough Network, Nature Nanotechnology, Vol. 8, No. 6, pp. 421-425, 2013, https://doi.org/10.1038/nnano.2013.84.

10.1038/nnano.2013.8423685985
4

Ding, Z., Stoichkov, V., Horie, M., Brousseau, E., and Kettle, J., Spray Coated Silver Nanowires as Transparent Electrodes in OPVs for Building Integrated Photovoltaics Applications, Solar Energy Materials and Solar Cells, Vol. 157, pp. 305-311, 2016, https://doi.org/10.1016/j.solmat.2016.05.053.

10.1016/j.solmat.2016.05.053
5

Lee, S. E., Lee, G. N., Ye, S. C., Lee, S. H., and Kim, J., Metal Oxide-Based Heterojunction Broadband Photodetector, Journal of the Korean Institute of Electrical and Electronic Material Engineers, Vol. 31, No. 3, pp. 165-170, 2018, https://doi.org/10.4313/JKEM.2018.31.3.165.

6

Lei, P., Chen, X., Yan, Y., Zhang, X., Hao, C., Peng, J., Ji, J., and Zhong, Y., Sputtered ITO/Ag/ITO films: Growth Windows and Ag/ITO Interfacial Properties, Journal of Electronic Materials Vol. 51, No. 5, pp. 2645-2651, 2022, https://doi.org/10.1007/s11664-022-09519-5.

10.1007/s11664-022-09519-5
7

Han, J., Sung, C., Shin, C. W., Kim, Y. S., and Kim, T. Y., Optimization of Oxide Materials in Oxide-Metal-Oxide (OMO) Electrodes for Flexible Electrochromic Devices, Solar Energy Materials and Solar Cells, Vol. 249, 112035, 2023, https://doi.org/10.1016/j.solmat.2022.112035.

10.1016/j.solmat.2022.112035
8

Thonglem, S., Intatha, U., Pengpat, K., Rujijanagul, G., Tunkasiri, T., and Eitssayeam, S., Sutatip, Electrical and Optical Properties of ITO/Au/ITO Multilayer Films for High Performance TCO Films, Ferroelectrics, Vol. 457, No. 1, pp. 117-123, 2013, https://doi.org/10.1080/00150193.2013.848766.

10.1080/00150193.2013.848766
9

Choi, J., High-performance Flexible Transparent Heater Using Planar-heating Element of Oxide-Metal-Oxide Structure for Application of Wearable Devices, Master's thesis, Dongeui University, 2022.

10

Jeong, J. A. and Kim, H. K., Low Resistance and Highly Transparent ITO-Ag-ITO Multilayer Electrode Using Surface Plasmon Resonance of Ag Layer for Bulk-heterojunction Organic Solar Cells, Solar Energy Materials and Solar Cells, Vol. 93, No. 10, pp. 1801-1809, 2009, https://doi.org/10.1016/j.solmat.2009.06.014.

10.1016/j.solmat.2009.06.014
11

Choi, C., Lee, J., Kang, W., Thanh, T. N., Lee, J., and Kim, J., Usability Assessment of EMP for Improved Optical Properties of OMO Structure, Journal of the Korean Solar Energy Society, Vol. 43, No. 3, pp. 41-49, 2023, https://doi.org/10.7836/kses.2023.43.3.041.

10.7836/kses.2023.43.3.041
12

Kim, H. B., Kim, D. H., Lee, G. H., and Kim, K. H., Electrical and Optical Properties of Transparent Conducting Films Having GZO/Metal/GZO Hybrid-structure, Journal of the Korean Institute of Surface Engineering, Vol. 43, No. 3, pp. 148-153, 2010, https://doi.org/10.5695/JKISE.2010.43.3.148.

10.5695/JKISE.2010.43.3.148
13

Choi, D., The Transmittance Modulation of ZnO/Cu/ZnO Transparent Conductive Electrodes Prepared on Glass Substrates, Materials, Vol. 13, No. 18, 3916, 2020, https://doi.org/10.3390/ma13183916.

10.3390/ma1318391632899748PMC7558142
14

Kim, J., Characteristics of ITO/Ag/ITO Hybrid Layers Prepared by Magnetron Sputtering for Transparent Film Heaters, Master's thesis, Pusan National University, 2017, https://doi.org/10.23172/pusan.000000120068.21016.0000276.

10.3807/JOSK.2016.20.6.807
15

Choi, K. H., Kim, J. Y., Lee, Y. S., and Kim, H. J., ITO/Ag/ITO Multilayer Films for the Application of a Very Low Resistance Transparent Electrode, Thin Solid Films, Vol. 341, No. 1-2, pp. 152-155, 1999, https://doi.org/10.1016/S0040-6090(98)01556-9.

10.1016/S0040-6090(98)01556-9
16

Lee, J., Hong, J., Patel, M., Lee, K., and Kim, J., Transparent Electromagnetic Wave․ Shielding Film of ITO/Ag/ITO, The Transactions of the Korean Institue of Electrical Engineers, Vol. 71, No. 3, pp. 512-516, 2022, https://doi.org/10.5370/kiee.2022.71.3.512.

10.5370/KIEE.2022.71.3.512
17

Kim, H., Lee, G., Becker, S., Kim, J. S., Kim, H., and Hwang, B., Novel Patterning of Flexible and Transparent Ag Nanowire Electrodes Using Oxygen Plasma Treatment, Journal of Materials Chemistry C, Vol. 6, No. 35, pp. 9394-9398, 2018, https://doi.org/10.1039/C8TC02377H.

10.1039/C8TC02377H
18

Schumacher, D., The Electrical Conductivity of Thin Metal Films, Surface Scattering Experiments with Conduction Electrons, Vol. 128, pp. 3-15, 1993, https://doi.org/10.1007/BFb0107232.

10.1007/BFb0107232
19

Huang, S., Liu, Y., Yang, F., Wang, Y., Yu, T., and Ma, D., Metal Nanowires for Transparent Conductive Electrodes in Flexible Chromatic Devices: A Review, Environmental Chemistry Letters, Vol. 20, No. 5, pp. 3005-3037, 2022, https://doi.org/10.1007/s10311-022-01471-4.

10.1007/s10311-022-01471-4
20

Hwang, B. and Matteini, P., Review of the Versatile Patterning Methods of Ag Nanowire Electrodes, Coatings, Vol. 13, No. 3, 617, 2023, https://doi.org/10.3390/coatings13030617.

10.3390/coatings13030617
21

Kwak, M., A Review-Productivity Enhancements of Micro/Nano Patterning Methods, Journal of the Korean Society for Precision Engineering, Vol. 35, No. 11, pp. 1019-1026, 2018, https://doi.org/10.7736/KSPE.2018.35.11.1019.

10.7736/KSPE.2018.35.11.1019
22

Gupta, R., Walia, S., Hösel, M., Jensen, J., Angmo, D., Krebs, F. C., and Kulkarni, G. U., Solution Processed Large Area Fabrication of Ag Patterns as Electrodes for Flexible Heaters, Electrochromics and Organic Solar Cells, Journal of Materials Chemistry A, Vol. 2, No. 28, pp. 10930-10937, 2014, https://doi.org/10.1039/C4TA00301B.

10.1039/c4ta00301b
23

Moonkyu, K., A Review - Productivity Enhancements of Micro/Nano Patterning Methods, Journal of the Korean Society for Precision Engineering, Vol. 35, No. 11, pp. 1019-1026, 2018, https://doi.org/10.7736/KSPE.2018.35.11.1019.

10.7736/KSPE.2018.35.11.1019
24

Choi, S., A Study of Electrical, Optical, Structural and Mechanical Properties of TIO/Ag/TIO Multilayer Films by Electron Beam irradiation for Flexible Display Devices, Master's thesis, University of Ulsan , 2021, https://oak.ulsan.ac.kr/handle/2021.oak/5989.

25

Kim, B. K., Lee, B. H., Cho, K. S., and Lee, S. Y., Simulation and Optimization of Layer Thickness of Amorphous Oxide SIZO/Ag/SIZO Multilayer to Enhance Transmittance of Transparent Electrodes without Sacrificing Sheet Resistance, Journal of Alloys and Compounds, Vol. 798, pp. 622-627, 2019, https://doi.org/10.1016/j.jallcom.2019.05.254.

10.1016/j.jallcom.2019.05.254
Information
  • Publisher :Korean Solar Energy Society
  • Publisher(Ko) :한국태양에너지학회
  • Journal Title :Journal of the Korean Solar Energy Society
  • Journal Title(Ko) :한국태양에너지학회 논문집
  • Volume : 44
  • No :5
  • Pages :33-42
  • Received Date : 2024-08-19
  • Revised Date : 2024-10-01
  • Accepted Date : 2024-10-02
  • DOI :https://doi.org/10.7836/kses.2024.44.5.033
Journal Informaiton Journal of the Korean Solar Energy Society Journal of the Korean Solar Energy Society
Online Submission
  • NRF
  • KOFST
  • crossref crossmark
  • crossref cited-by
  • crosscheck
  • orcid
  • open access
  • ccl
Journal Informaiton Journal Informaiton - close