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2024 Vol.44, Issue 6 Preview Page

Research Article

Study on Improving Uniformity of Ag Printed Electric Line through Vacuum Annealing and Resulting Reduction in Heat Generation and High-Temperature Environmental Durability

진공 열처리를 통한 Ag 인쇄 도선 균일성 향상과 이에 따른 발열 감소 및 고온 환경 내구성 연구

Sung Jun Park1
,
Gun Woong Kim2
,
Jaebum Jeong3
,
Jin Hong Park4
,
Jun Young Kim5*
박 성준1
,
김 건웅2
,
정 재범3
,
박 진홍4
,
김 준영5*
1A Bachelor’s Degree, Department of Semiconductor Engineering, Gyeongsang National University
2Master Course, Department of Semiconductor Engineering, Gyeongsang National University
3Ph.D Course, Department of Semiconductor Engineering, Gyeongsang National University
4A Bachelor’s Degree, School of Electronic Engineering, Gyeongsang National University
5Associate Professor, Department of Semiconductor Engineering, Gyeongsang National University
1경상국립대학교 반도체공학과, 학사과정
2경상국립대학교 반도체공학과, 석사과정
3경상국립대학교 반도체공학과, 박사과정
4경상국립대학교 전자공학부, 학사과정
5경상국립대학교 반도체공학과, 교수
*Corresponding Author
30 December 2024. pp. 145-156
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Abstract

Electronic printing processes are gaining attention as next-generation eco-friendly patterning processes that can replace conventional patterning processes in semiconductor manufacturing that cause harmful problems and large amounts of pollutants. In the formation of patterned thin films by the electronic printing process, the unevenness of the film caused by the coffee ring effect, affects the performance of the device, and requires the identification of a process method for uniform film formation. In this study, Ag ink was printed with a dispenser to form an electrical line, and a thin film was formed by splitting the solvent drying temperature for 5 min and the ambient heat treatment conditions for 5 min. The uniformity of the thin film was analyzed, and the voltage-heat generation characteristics of the electric line and the shape retention ability of the thin film in a high-temperature environment were examined according to the uniformity of the thin film. Vacuum-annealing could create a uniform thin film. When evaluating the heat generation characteristics using a maximum applied voltage of 5V, the electrical conduction for a uniform thin film showed 83.1°C, whereas the coffee ring effect caused the electrical conduction for a non-uniform thin film to show 105°C heat generation. This showed that electrical conduction with a uniform thin film resulted in a 26% reduction in heat generation characteristics. In addition, it was confirmed that the printed electrical line with a uniform thin film had little change in shape at high temperatures. This confirms that a uniform thin film can suppress the heat generation of the conductor and cause little deformation in high-temperature environments, so it can be used in various environments.

Keywords
Printing Process
Uniformity
Coffee-ring effect
Vacuum annealing
Heat generation characteristics
키워드
인쇄공정
균일성
커피링 효과
진공 열처리
발열 특성
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Information
  • Publisher :Korean Solar Energy Society
  • Publisher(Ko) :한국태양에너지학회
  • Journal Title :Journal of the Korean Solar Energy Society
  • Journal Title(Ko) :한국태양에너지학회 논문집
  • Volume : 44
  • No :6
  • Pages :145-156
  • Received Date : 2024-12-11
  • Revised Date : 2024-12-12
  • Accepted Date : 2024-12-15
  • DOI :https://doi.org/10.7836/kses.2024.44.6.145
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